Fabrication of Dense Non-Circular Nanomagnetic Device Arrays Using Self-Limiting Low-Energy Glow-Discharge Processing

Authors

Zhen Zheng, Electrical and Computer Engineering, University of Houston, Houston, Texas; Center for Integrated Bio and Nano Systems University of Houston, Houston, Texas
Long Chang, Electrical and Computer Engineering, University of Houston, Houston, Texas; Center for Integrated Bio and Nano Systems University of Houston, Houston, Texas
Ivan Nekrashevich, Electrical and Computer Engineering, University of Houston, Houston, Texas; Center for Integrated Bio and Nano Systems University of Houston, Houston, Texas
Paul Ruchhoeft, Electrical and Computer Engineering, University of Houston, Houston, Texas; Center for Integrated Bio and Nano Systems University of Houston, Houston, Texas
Sakhrat Khizroev, Electrical & Computer Engineering, Florida International University, Miami, FloridaFollow
Dmitri Litvinov, Chemical and Biomolecular Engineering, University of Houston, Houston, Texas; Chemistry, University of Houston, Houston, TexasFollow

Date of this Version

8-14-2013

Document Type

Article

Abstract

We describe a low-energy glow-discharge process using reactive ion etching system that enables non-circular device patterns, such as squares or hexagons, to be formed from a precursor array of uniform circular openings in polymethyl methacrylate, PMMA, defined by electron beam lithography. This technique is of a particular interest for bit-patterned magnetic recording medium fabrication, where close packed square magnetic bits may improve its recording performance. The process and results of generating close packed square patterns by self-limiting low-energy glow-discharge are investigated. Dense magnetic arrays formed by electrochemical deposition of nickel over self-limiting formed molds are demonstrated.

Comments

This article was originally published in PLOS One.

Creative Commons License

This work is licensed under a Creative Commons Attribution 3.0 License.

Recommended Citation

Zheng Z, Chang L, Nekrashevich I, Ruchhoeft P, Khizroev S, et al. (2013) Fabrication of Dense Non-Circular Nanomagnetic Device Arrays Using Self-Limiting Low-Energy Glow-Discharge Processing. PLoS ONE 8(8): e73083. doi:10.1371/journal.pone.0073083