Date of this Version
2014
Document Type
Article
Abstract
A micro-electro-mechanical (MEM) switch built on a superconducting microstrip filter will be utilized to investigate BaTiO3 dielectric patches for functional switching points of contact. Actuation voltage resulting from the MEM switch provokes static friction between the bridge membrane and BaTiO3 insulation layer. The dielectric patch crystal structure and roughness affect the ability of repetitively switching cycles and lifetime. A series of experiments have been performed using different deposition methods and RF magnetron sputtering was found to be the best deposition process for the BaTiO3 layer. The effect examination of surface morphology will be presented using characterization techniques as x-ray diffraction, SEM and AFM for an optimum switching device. The thin film is made of YBa2Cu3O7 deposited on LaAlO3 substrate by pulsed laser deposition. For this work, the dielectric material sputtering pressure is set at 9.5x10-6 Torr. The argon gas is released through a mass-flow controller to purge the system prior to deposition. RF power is 85 W at a distance of 9 cm. The behavior of Au membranes built on ultimate BaTiO3 patches will be shown as part of the results. These novel surface patterns will in turn be used in modelling other RF MEM switch devices such as distributed-satellite communication system operating at cryogenic temperatures.
Creative Commons License
This work is licensed under a Creative Commons Attribution 3.0 License.
Recommended Citation
Vargas, J.; Hijazi, Y.; Noel, J.; Vlasov, Yuriy; and Larkins, Grover, "Effectiveness of BaTiO3 dielectric patches on YBa2Cu3O7 thin films for MEM switches" (2014). Electrical and Computer Engineering Faculty Publications. 23.
https://digitalcommons.fiu.edu/ece_fac/23
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Comments
Originally published in Journal of Physics: Conference Series