Document Type



Master of Science (MS)


Electrical Engineering

First Advisor's Name

Grover L. Larkins

First Advisor's Committee Title

Committee Chair

Second Advisor's Name

Yuri Vlassov

Third Advisor's Name

J. Rob Reid

Fourth Advisor's Name

John S. Derov

Date of Defense



Developing technologies have always faced the same problems. New applications require smaller systems, must consume less power, and provide greater sensitivity than what is currently available. This thesis provides crucial data for the manufacturing of a microelectromechanical (MEM) switch on a superconducting transmission line. New applications of front-end antennas require small, low-loss switches. MEM switches have shown insertion losses less than 0.1 dB and isolation of 50 dB at RF frequencies. Superconducting transmission lines can provide circuits with extremely low attenuation. The combination of the two can provide the best system for the need of these new applications. This thesis had two goals. The first was to create a process for the fabrication of a MEM switch on a superconductor based circuit. The second was to provide information on the individual process steps with special attention on the compatibility of the superconductor, YBa2Cu,0„7, with the fabrication steps. Both of these goals have been achieved and a fabrication process was successfully designed that can be used to fabricate a MEM capacitive switch on YBa2Cu;0„.7.




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