Document Type



Master of Science (MS)


Mechanical Engineering

First Advisor's Name

W. Kinzy Jones

First Advisor's Committee Title

Committee Chair

Second Advisor's Name

Yong X. Tao

Third Advisor's Name

Yiding Cao

Fourth Advisor's Name

Marc A. Zampino

Date of Defense



Increased device density, switching speeds of integrated circuits and decrease in package size is placing new demands for high power thermal-management. The convectional method of forced air cooling with passive heat sink can handle heat fluxes up-to 3-5W/cm2; however current microprocessors are operating at levels of 100W/cm2, This demands the usage of novel thermal-management systems. In this work, water-cooling systems with active heat sink are embedded in the substrate.

The research involved fabricating LTCC substrates of various configurations - an open-duct substrate, the second with thermal vias and the third with thermal vias and free-standing metal columns and metal foil. Thermal testing was performed experimentally and these results are compared with CFD results. An overall thermal resistance for the base substrate is demonstrated to be 3.4oC/W-cm2. Addition of thermal vias reduces the effective resistance of the system by 7times and further addition of free standing columns reduced it by 20times.





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