Design and fabrication of a microelectromechanical (MEM) switch-based microwave high Tc superconductor resonator

Document Type



Master of Science (MS)


Electrical Engineering

First Advisor's Name

Grover Larkins

First Advisor's Committee Title

Committee Chair

Second Advisor's Name

Yuri Vlassov

Third Advisor's Name

Mariya Brzhezinskaya

Fourth Advisor's Name

Jean Andrian

Date of Defense



This work extends the use of our high performance (less than 0.05 dB insertion loss, greater than 30 dB isolation) high-Tc superconductor MEM switch to a switched-based coplanar waveguide "T"-resonator structure. The most significant advantages here are its low mass and volume. Competitive technologies require actuators on the order of a few milligrams to a few tens of grams or more and volumes of the order of tens of cm3. The integrated MEM devices present the designer with an alternative of a mass of a few micrograms and a volume of less than 5x 10-6 cm3 at the same performance levels. The design of the switch was optimized using Sonnet simulations.



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